JPH0316325U - - Google Patents
Info
- Publication number
- JPH0316325U JPH0316325U JP7647189U JP7647189U JPH0316325U JP H0316325 U JPH0316325 U JP H0316325U JP 7647189 U JP7647189 U JP 7647189U JP 7647189 U JP7647189 U JP 7647189U JP H0316325 U JPH0316325 U JP H0316325U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- boat
- wafers
- loaded
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7647189U JPH0316325U (en]) | 1989-06-28 | 1989-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7647189U JPH0316325U (en]) | 1989-06-28 | 1989-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316325U true JPH0316325U (en]) | 1991-02-19 |
Family
ID=31617972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7647189U Pending JPH0316325U (en]) | 1989-06-28 | 1989-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316325U (en]) |
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1989
- 1989-06-28 JP JP7647189U patent/JPH0316325U/ja active Pending